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XYZ Piezo Nanopositioner - Series TRITOR

Piezosystem Jena offers a complete "TRITOR" series of extremely compact piezoelectric actuator based 3D nanopositioners. The XYZ Piezo nano positioners offer motions of 9µm up to 400µm in all three axes. In addition, due to the mechanical design, parallel motion is achieved without mechanical play. Integrated XYZ Piezo nano positioner control systems are available as an option for overcoming the natural effect of hysteresis.

TRITOR Series - Highlights

  • Compact design resulting in superior performance with an integrated feedback sensor system option
  • Accurate parallel motion through parallelogram design and high reliability due to solid state hinges
  • Motion without mechanical play and high resolution in nm and sub-nm range
  • Motion up to 400 µm
  • Precision pin holes for mounting and assembly

TRITOR series XYZ Piezo nano positioner can be easily combined with other mechanical positioning systems, and are well suited for various applications ranging from optical research to OEM systems.

Mounting Instructions:

TRITOR elements consist of actuators integrated in a housing with an internal lever transmission. Since the lever mechanism works in both directions, forces between the housing and top plate need to be avoided, as they could damage the stage.

The XYZ Piezo nano positioner stage is attached by the use of two diagonal threaded holes. Components can be mounted on the top plate by using these two diagonal holes and can be accurately located with the precision pinhole assembly.

Please contact our company direct or contact a local representative for information on our XYZ Piezo nano positioner options.

XYZ Piezo Nanopositioner

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Product Overview

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microTRITOR - 3D nanopositioners
Motion range XYZ: up to 9 µm
Size: 15 x 15 x 15 mm/without central opening
Applications: probe scanning in cryogenic application
Smallest 3D piezo stage available!

miniTRITOR - 3D (XYZ) Positioning Element
Motion range XYZ: up to 38 µm
Size: 19x19x16mm/without central opening
Applications: scanning, semiconductor, micro machining
Compact size 3D piezo stage

TRITOR 38 - 3D Nanopositioners
Motion range XYZ: up to 38 µm
Size: 25 x 25 x 27 mm/Option: SG feedback
Application: scanning, fiber alignment, assembling
Compact size 3D piezo stage

TRITOR 50 - XYZ Multiaxes Positioning Stages
Motion range XYZ: up to 50 µm
Size: 55 x 42 x 34.5 mm/with integrated feedback
Applications: metrology, micro machining
High resolution 3D piezo stage

TRITOR 100 - 3D Positioning Element
Motion range XYZ: up to 100 µm
Size: 40 x 40 x 34 mm / Option: feedback
Applications: metrology, micro machining, alignment
Universal 3D nano system

TRITOR 101 - 3D Multiaxes Positioning Stages
Motion range XYZ: up to 100 µm
Size: 68 x 68 x 30 mm / Option: feedback
Applications: microscopy, beam alignment
3D nano system with ø30mm center hole

TRITOR 102 - XYZ Nanopositioners
Motion range XYZ: up to 100 µm
Size: 80 x 80 x 30 mm / Option: feedback
Applications: microscopy, beam alignment
3D nano system with ø40 mm center hole

TRITOR 320 - 3D Multiaxes Positioning Stages
Motion range XY: 50 µm Z: up to 320 µm
Size: 320 x 320 x 55 mm / option: feedback
Applications: wafer & lithography
3D high load stage, opening: 150 x 150 mm

TRITOR 400 - 3D nanopositioning systems
Motion range XYZ: up to 400 µm
Size: 116 x 106.5 x 40 mm / Option: feedback
Applications: optics, probe alignment
3D positioning element, opening: 12.5 (19) mm* diameter
*depending on type of feedback sensor

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